Electrical characteristics of silicon-nodule-related via failures observed in aluminum-silicon interconnects
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Published:2000-02-22
Issue:3
Volume:4
Page:125-130
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ISSN:1432-8488
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Container-title:Journal of Solid State Electrochemistry
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language:
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Short-container-title:Journal of Solid State Electrochemistry
Author:
Itsumi Manabu,Ohfuji Shin-ichi,Akiya Hideo,Nakayama Satoshi,Yoshino Hideo
Publisher
Springer Science and Business Media LLC
Subject
Electrical and Electronic Engineering,Electrochemistry,Condensed Matter Physics,General Materials Science