Micromechanical precision pressure sensor incorporating SAW delay lines

Author:

Jungwirth M.,Scherr H.,Weigel R.

Publisher

Springer Science and Business Media LLC

Subject

Mechanical Engineering,Computational Mechanics

Reference23 articles.

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2. Morgan, D. P.: Surface-wave devices for signal processing. New York: Elsevier 1985.

3. Sinh,, B. K., Tanski, W. J., Lukaszek, T., Ballato, A.: Influence of biasing stresses on the propagation of surface waves. J. Appl. Phys.57, 767?776 (1985).

4. Matthews, H.: Surface wave filters, New York: Wiley 1977.

5. Nalamwar, A. L., Epstein, M.: Surflae acoustic waves in strained media. J. Appl. Phys.47, 43?48 (1976).

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