Rapid thermal processing of TiN coatings deposited by chemical and physical vapor deposition using a low-energy, high-current electron beam: Microstructural studies and properties-Reference-Cited by-同舟云学术

Rapid thermal processing of TiN coatings deposited by chemical and physical vapor deposition using a low-energy, high-current electron beam: Microstructural studies and properties

Published:1999-11 Issue:11 Volume:30 Page:2931-2939
ISSN:1073-5623
Container-title:Metallurgical and Materials Transactions A
language:en
Short-container-title:Metall and Mat Trans A

Author:

Perry Anthony J.,Matossian Jesse N.,Vajo John J.,Doty Robert E.,Bull Steve J.,Page Trevor F.,Proskurovsky Dmitri I.,Rotshtein Vladimir P.,Markov Alexey B.,Rice-Evans Peter C.,Taylor James,Geist Daniel E.

Publisher

Springer Science and Business Media LLC

Subject

Metals and Alloys,Mechanics of Materials,Condensed Matter Physics

Link

http://link.springer.com/content/pdf/10.1007/s11661-999-0130-9.pdf

Reference19 articles.

1. A.J. Perry, L. Simmen, and L. Chollet: Thin Solid Films, 1984, vol. 118, pp. 271–77.

2. D.E. Geist, A.J. Perry, J.R. Treglio, V. Valvoda, and D. Rafaja: Adv. X-ray Anal., 1995, vol. 38, pp. 471–78.

3. K. Yatsui: Laser Particle Beams, 1989, vol. 7, pp. 733–41.

4. H.A. Davis, G.E. Remnev, R.W. Stinnett, and K. Yatsui: MRS Bull., 1996, vol. 21, pp. 58–62.

5. A.J. Perry and J.N. Matossian: Metall. Mater. Trans. A, 1998, vol. 29A, pp. 593–610.

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