Particle on surface: 3D-effects in dry laser cleaning
Author:
Publisher
Springer Science and Business Media LLC
Subject
General Materials Science,General Chemistry
Link
http://link.springer.com/content/pdf/10.1007/s00339-004-2567-4.pdf
Reference26 articles.
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4. Y.F. Lu, W.D. Song, B.W. Ang, M.H. Hong, S.S.H. Chan, T.S. Low: Appl. Phys. A 65, 9 (1997)
5. Y.F. L, Y.W. Zheng, W.D. Song: J. Appl. Phys. 87, 1534 (2000)
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