Ag thickness and substrate effects on microstructural and optoelectronic properties of AZO/Ag/AZO multilayer structures deposited by confocal RF magnetron sputtering
Author:
Publisher
Springer Science and Business Media LLC
Subject
General Materials Science,General Chemistry
Link
https://link.springer.com/content/pdf/10.1007/s00339-023-06822-8.pdf
Reference88 articles.
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4. E. Espid, F. Taghipour, Development of highly sensitive ZnO/In2O3 composite gas sensor activated by UV-LED. Sens. Actuators B Chem. 241, 828–839 (2017). https://doi.org/10.1016/j.snb.2016.10.129
5. F. Meriche, T. Touam, A. Chelouche, M. Dehimi, J. Solard, A. Fischer, A. Boudrioua, L.H. Peng, Post-annealing effects on the physical and optical waveguiding properties of RF sputtered ZnO thin films. Electron. Mater. Lett. 11, 862–870 (2015). https://doi.org/10.1007/s13391-015-5005-1
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