Removal of oxygen atoms from a SiO 2 surface by incoherent vacuum ultraviolet excimer irradiation-Reference-Cited by-同舟云学术

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Removal of oxygen atoms from a SiO 2 surface by incoherent vacuum ultraviolet excimer irradiation

Published:2003-02-01 Issue:2 Volume:76 Page:139-141
ISSN:0947-8396
Container-title:Applied Physics A: Materials Science & Processing
language:
Short-container-title:Applied Physics A: Materials Science & Processing

Author:

Ohtsubo T.,Azuma T.,Takaura M.,Higashiguchi T.,Kubodera S.,Sasaki W.

Publisher

Springer Science and Business Media LLC

Subject

General Materials Science,General Chemistry

Link

http://link.springer.com/content/pdf/10.1007/s00339-002-1458-9.pdf

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