Design and performance of two-channel EUV multilayer mirrors with enhanced spectral selectivity-Reference-Cited by-同舟云学术

Design and performance of two-channel EUV multilayer mirrors with enhanced spectral selectivity

Published:2009-01-31 Issue:2 Volume:95 Page:401-408
ISSN:0947-8396
Container-title:Applied Physics A
language:en
Short-container-title:Appl. Phys. A

Author:

Hecquet Christophe,Delmotte Franck,Ravet-Krill Marie-Françoise,Rossi Sébastien,Jérome Arnaud,Bridou Françoise,Varnière Françoise,Meltchakov Evgueni,Auchère Frédéric,Giglia Angelo,Mahne Nicola,Nanaronne Stefano

Publisher

Springer Science and Business Media LLC

Subject

General Materials Science,General Chemistry

Link

http://link.springer.com/content/pdf/10.1007/s00339-009-5082-9.pdf

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