Plasma-assisted hot filament chemical vapor deposition of AlN thin films on ZnO buffer layer: toward highly c-axis-oriented, uniform, insulative films-Reference-Cited by-同舟云学术

Plasma-assisted hot filament chemical vapor deposition of AlN thin films on ZnO buffer layer: toward highly c-axis-oriented, uniform, insulative films

Published:2014-08-07 Issue:4 Volume:117 Page:2217-2224
ISSN:0947-8396
Container-title:Applied Physics A
language:en
Short-container-title:Appl. Phys. A

Author:

Alizadeh M.,Mehdipour H.,Ganesh V.,Ameera A. N.,Goh B. T.,Shuhaimi A.,Rahman S. A.

Publisher

Springer Science and Business Media LLC

Subject

General Materials Science,General Chemistry

Link

http://link.springer.com/content/pdf/10.1007/s00339-014-8649-z.pdf

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