Funder
Japan Society for the Promotion of Science
Publisher
Springer Science and Business Media LLC
Subject
General Materials Science,General Chemistry
Reference43 articles.
1. B. Boswell, M.N. Islam, I.J. Davies, Int. J. Adv. Manuf. Technol. 94, 789 (2018)
2. L. Zhou, T. Shiina, Z. Qiu, J. Shimizu, T. Yamamoto, T. Tashiro, Precis. Eng. 33, 499 (2009)
3. J. Chen, Y. Lin, C. Kuo, C.Ho, and W. Yau, Smart Sci. 7, 169 (2019).
4. Z. Cao, B. VanderElzen, K. J. Owen, J. Yan, G. He, R. L. Peterson, D. Grimard, and K. Najafi, 2013 IEEE 26th Int. Conf. Micro Electro Mech. Syst. (MEMS), 361 (2013).
5. B. Keiper, H. Exner, U. Löschner, T. Kuntze, J. Laser Appl. 12, 189 (2000)
Cited by
2 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献