Publisher
Springer Science and Business Media LLC
Subject
General Physics and Astronomy
Reference80 articles.
1. Shibaki M., Horiike Y., Yamazaki T., Kashiwagi M.:in Proc. Electrochem. Soc. Fall Meeting, Atlanta 1977. Abstract 152, p. 416.
2. Bárdoš L., Musil J.: Czech. J. Phys. B35 (1985) 1437.
3. Tsu D. V., Lucovsky G.: J. Vac. Sci. Technol. A4 (1986) 480.
4. Hayasaha N., Okano H., Horiike Y.: Solid State Technol.31 (1988) 127.
5. Bersin R. L.: Microelec. Manufac. Testing9 (1986) 18.
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