1. R.M. Osgood, Jr., S.R.J. Brueck, H.R. Schlossberg (eds.):Laser Diagnostics and Photochemical Processing of Semiconductors (North-Holland, Amsterdam 1983)
2. A.W. Johnson, D.J. Ehrlich, H.R. Schlossberg (eds.):Laser-Controlled Chemical Processing of Surfaces (North-Holland, Amsterdam 1984)
3. Springer Ser. Chem. Phys.,1984
4. D.J. Ehrlich, J.Y. Tsao (eds.):Laser Microfabrication-Thin Film Processes and Lithography (Academic, San Diego 1989)
5. D. Bäuerle:Chemical Processing with Lasers, Springer Ser. Mater. Sci., Vol. 1 (Springer, Berlin, Heidelberg, 1986)