Performance of a piezo-hydraulic fine positioning device: Experimental analyses with a scaled model

Author:

Denkena Berend,Hülsemeyer Lars,Bergmeier MaikORCID

Funder

German Research Foundation

Publisher

Springer Science and Business Media LLC

Subject

Industrial and Manufacturing Engineering,Mechanical Engineering

Reference15 articles.

1. Lünemann M (2006) Eigenschaftsermittlung von Konstruktionselementen in Werkstückspann-systemen. Dr.-Ing. Dissertation, Leibniz Universität Hannover, Hannover (ISBN: 3-939026-18-2)

2. Denkena B, Immel J, Gümmer O (2010) Mechatronic Chuck with 4 degrees of freedom precision positioning. In: Proceedings of the 10th Euspen Conference

3. Spath D, Mussa S (2001) Compensation of machine tool errors with a piezo device. Production engineering VIII/2:103–106 (ISBN: 3-9805589-9-1)

4. Yang C, Wang GL, Yang BS, Wang HR (2008) Research on the structure of high-speed large-scale ultra-precision positioning system. In: Proceedings of the 3rd IEEE International Conference, Sanya, pp 9–12

5. Jungnickel U, Eicher D, Schlaak H F (2002) Miniaturised micro-positioning system for large displacements and large forces based on an inchworm platform. In: Actuator 2002, 8th International Conference on New Actuators, pp 684–687

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