Funder
Deutsche Forschungsgemeinschaft
Publisher
Springer Science and Business Media LLC
Subject
Industrial and Manufacturing Engineering,Mechanical Engineering
Reference19 articles.
1. ISO 25178-70 (2014) Geometrical product specifications (GPS)—Surface texture: Areal—Part 70: Material measures (ISO 25178-70:2014)
2. Gao F, Leach RK, Pertzing J, Coupland JM (2008) Surface measurement errors using commercial scanning white light interferometers. Meas Sci Technol 19:015303
3. Frühauf J, Krönert S (2005) Wet etching of silicon gratings with triangular profiles. Microsyst Technol 11:1287–1291
4. Krüger-Sehm R, Dziomba T, Dai G (2004) Profile assessment of nano roughness standards by contact and non-contact methods. In: Dietzsch M (ed) Proceedings of the XI international conference on surfaces, part II. Aachen, pp 31–40
5. Eifler M, Schneider F, Seewig J, Kirsch B, Aurich JC (2016) Manufacturing of new roughness standards for the linearity of the vertical axis—feasibility study and optimization. Eng Sci Technol Int J 4:1993–2001
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