Two-dimensional spin coating with a vertical centrifugal force and the effect of artificial gravity on surface leveling
Author:
Funder
Chinese 863 projects
Publisher
Springer Science and Business Media LLC
Subject
Colloid and Surface Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,General Chemistry
Link
http://link.springer.com/content/pdf/10.1007/s11998-016-9823-3.pdf
Reference13 articles.
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2. Meyerhofer, D, “Characteristics of Resist Films Produced by Spinning.” J. Appl. Phys., 49 (7) 3993–3997 (1978)
3. Bornside, DE, Macosko, CW, Scriven, LE, “Spin Coating: One-Dimensional Model.” J. Appl. Phys., 66 (11) 5185–5193 (1989)
4. Washo, BD, “Rheology and Modeling of the Spin Coating Process.” IBM J. Res. Dev., 21 (2) 190–198 (1977)
5. Kistler, SF, Scriven, LE, “Coating Flows.” In: Ram, R (ed.) Computational Analysis of Polymer Processing, pp. 243–299. Springer, Dordrecht (1983)
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