Synergistic effect of CO2 and PH3 on the properties of n-type nanocrystalline silicon oxide prepared by plasma-enhanced chemical vapor deposition-Reference-Cited by-同舟云学术

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Synergistic effect of CO2 and PH3 on the properties of n-type nanocrystalline silicon oxide prepared by plasma-enhanced chemical vapor deposition

Published:2021-01-03 Issue:3 Volume:32 Page:2814-2821
ISSN:0957-4522
Container-title:Journal of Materials Science: Materials in Electronics
language:en
Short-container-title:J Mater Sci: Mater Electron

Author:

You Jiachuan^ORCID,Zhao Lei,Diao Hongwei,Wang Wenjing

Funder

National Natural Science Foundation of China

“Transformational Technologies for Clean Energy and Demonstration”, Strategic Priority Research Program of the Chinese Academy of Sciences

Beijing Municipal Science and Technology Project

Publisher

Springer Science and Business Media LLC

Subject

Electrical and Electronic Engineering,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Link

http://link.springer.com/content/pdf/10.1007/s10854-020-05034-7.pdf

Reference24 articles.

1. A. Lambertz, V. Smirnov, T. Merdzhanova et al., Sol. Energy Mater. Sol. Cells 119, 134 (2013). https://doi.org/10.1016/j.solmat.2013.05.053

2. A. Lambertz, T. Grundler, F. Finger, J. Appl. Phys. 109, 113109 (2011). https://doi.org/10.1063/1.3592208

3. A. Richter, L. Zhao, F. Finger, K.N. Ding, Surf. Coat. Technol. 295, 119 (2016). https://doi.org/10.1016/j.surfcoat.2015.09.016

4. A. Richter, V. Smirnov, A. Lambertz, K. Nomoto, K. Welter, K. Ding, Sol. Energy Mater. Sol. Cells 174, 196 (2018). https://doi.org/10.1016/j.solmat.2017.08.035

5. P. Procel, G.T. Yang, O. Isabella, M. Zeman, Sol. Energy Mater. Sol. Cells 186, 66 (2018). https://doi.org/10.1016/j.solmat.2018.06.021

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1. Synergetic Effect of Gas Compositions on Material Properties of n‐Type Nanocrystalline Silicon Oxide Prepared by Plasma‐Enhanced Chemical Vapor Deposition;Solar RRL;2024-03-29

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3. Nanocrystalline silicon-oxygen based tunneling recombination junctions in perovskite/silicon heterojunction tandem solar cells;Solar Energy Materials and Solar Cells;2023-10

4. Integration of thin n-type nc-Si:H layers in the window-multilayer stack of heterojunction solar cells;Solar Energy Materials and Solar Cells;2022-12

5. Phosphorus-doped nanocrystalline silicon-oxycarbide thin films;Journal of Alloys and Compounds;2021-09

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