Author:
Miyaji A.,Suzuki K.,Tanimoto A.
Publisher
Springer Science and Business Media LLC
Subject
Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference40 articles.
1. G. M. DUBROEUCQ and D. ZAHORSKY, Proc. Int. Conf. Microcircuit Engg, Grenoble, 1982, p. 73.
2. K.JAIN, C. G.WILLSON and B. J.LIN, IBM J. Res. Develop., 26(2) (1982) 151.
3. V.POL, J. H.BENNEWITZ, G. C.ESCHER, M.FELDMAN, V. A.FIRTION, T. E.JEWELL, B. E.WILCOMB and J. T.CLEMENS, Proc. SPIE 633 (1986) 6.
4. D.MARKLE, Solid State Technol. 20 (1984) 159.
5. R. W.McCLEARY and P. J.TOMPKINS, Proc. SPIE 922 (1988) 396.
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