The effect of lanthanum chloride on the electrocrystallization behavior of cobalt and grain refinement in deposition layers

Author:

Xu Yang-tao,Peng Yin,Dai Jing-min,Du Hai-yang,Pei Liang

Publisher

Springer Science and Business Media LLC

Subject

Materials Chemistry,Electrochemistry,General Chemical Engineering

Reference37 articles.

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3. Hui W, Hao WX, Jia G (2016) Research status and development trend of ion exchange membrane modification. Inorg Salt Ind 48(06):1–4

4. Zhu X, Zhu J, Li A (2009) Challenges in atomic-scale characterization of high-k dielectrics and metal gate electrodes for advanced CMOS gate stacks. J Mater Sci Technol 25(03):289

5. Jun WL, Han ZZ, Wen WY (2022) Research progress of chip cobalt interconnect and its superfill plating technology. J Electrochem 28(6):2104431

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