Au/Ge/Pd ohmic contacts to n-GaAs with the Mo/Ti diffusion barrier-Reference-Cited by-同舟云学术

Au/Ge/Pd ohmic contacts to n-GaAs with the Mo/Ti diffusion barrier

Published:1996-12 Issue:12 Volume:25 Page:1818-1822
ISSN:0361-5235
Container-title:Journal of Electronic Materials
language:en
Short-container-title:JEM

Author:

Chai Chun-Yi,Huang Jung-A,Lai Yong-Lin,Wu Janne-Wha,Chang Chun-Yen,Chan YI-Jen,Cheng Huang-Chung

Publisher

Springer Science and Business Media LLC

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

http://link.springer.com/content/pdf/10.1007/BF02657159.pdf

Reference14 articles.

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3. E.D. Marshall, C.S. Wu, C.S. Pai, D.M. Scott and S.S. Lau,Thin Films: The Relationship of Structure to Properties, ed. C.R. Aita and K S. Sree Harsha 47, 161 (Pittsburgh, PA: Mater. Res. Soc, 1985).

4. E.D. Marshall, B. Zhang, L.C. Wang, P.F. Jiao, W.X. Chen, T. Sawada, S.S. Lau, KL. Kavanagh and T.F. Kuech,J. Appl. Phys. 62,942(1987).

5. J.T. Lai and J.Y.M. Lee,Appl. Phys. Lett. 64, 306 (1994).

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