Micromachined Pyroelectric Probe for Non-Contact Thermal Diagnostic Systems

Author:

SUITA Kenji1,HARA Motoaki1,ISHIKAWA Shinya1,TANAKA Katsuhiro1,NAGASAWA Sumito1,KUWANO Hiroki1

Affiliation:

1. Department of Nanomechanics Graduate School of Engineering, Tohoku University

Publisher

Japan Society of Mechanical Engineers

Subject

Industrial and Manufacturing Engineering,Mechanical Engineering

Reference23 articles.

1. (1) Black. J, Electromigration-a brief survey and some recent results, IEEE Trans. Electron Devices, 16 (1969) pp.338-347.

2. (2) Tu. K, Recent advances on electromigration in very-large-scale- integration of interconnects, J. Appl. Phys., 94, 9 (2003), pp.5451-5473.

3. (3) Williams. C, and Wickramasinghe. H, Scanning thermal profiler, Appl. Phys. Lett., vol. 49, 23 (1986), pp.1587-1589.

4. (4) Majundar. A, Carrejo. J, and Lai. J, Thermal imaging using the atomic force microscope, Appl. Phys. Lett., 62, 20 (1993), pp.2501-2503.

5. (5) Majundar. A, Thermal microscopy and heat generation in electronic devices, Microelectronics Reliability, 38 (1998), pp.559-565.

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