High Speed Non-Contact Handling of a Steel Disk Using Feedforward Tilt Control
Author:
Affiliation:
1. Department of Precision Engineering, The University of Tokyo
Publisher
Japan Society of Mechanical Engineers
Link
https://www.jstage.jst.go.jp/article/jsdd/7/4/7_552/_pdf
Reference14 articles.
1. (1) Tokisue, H. and Inoue, H., Particulate-Contamination-Free Wafer-Handling Systems for Gas, Liquid and Vacuum Environments Used in a 64 Mbyte Dynamic Random-Access Memory Process, Wear, Vol. 168, No. 1-2 (1993), pp. 115-120.
2. (2) Lee H.G. and Lee D.G., Design of a Large LCD Panel Handling Air Conveyor with Minimum Air Consumption, Mechanism and Machine Theory, Vol. 41, No. 7 (2006), pp. 790-806.
3. (3) Reinhart G, Hoeppner J, and Zimmermann J., Non-Contact Wafer Handling Using High-Intensity Ultrasonics, Proc. 2001 IEEE/SEMI Advanced Semiconductor Manufacturing Conference, (2001), pp. 139-140.
4. (4) Xie, W. J. and Wei, B., Parametric Study of Single-Axis Acoustic Levitation, Applied Physics Letters, Vol. 79, No. 6 (2001), pp. 881-883.
5. (5) Jin, J., Higuchi, T., and Kanemoto, M., Electrostatic Levitator for Hard Disk Media, IEEE Transactions on Industrial Electronics, Vol. 42, No. 5 (1995), pp. 467-473.
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