Verification of nano-particle absolute height position measurement from a surface with invisible reference tilt resin by multi-wavelength evanescent fields-Reference-Cited by-同舟云学术

Verification of nano-particle absolute height position measurement from a surface with invisible reference tilt resin by multi-wavelength evanescent fields

Published:2024 Issue:4 Volume:18 Page:JAMDSM0049-JAMDSM0049
ISSN:1881-3054
Container-title:Journal of Advanced Mechanical Design, Systems, and Manufacturing
language:en
Short-container-title:JAMDSM

Author:

GOTO Daiki¹,KHAJORNRUNGRUANG Panart¹,BLATTLER Aran²,TERAYAMA Yutaka¹,OHTA Yuki¹

Affiliation:

1. Kyushu Institute of Technology

2. King Mongkut’s University of Technology North Bangkok

Publisher

Japan Society of Mechanical Engineers

Link

https://www.jstage.jst.go.jp/article/jamdsm/18/4/18_2024jamdsm0049/_pdf

Reference15 articles.

1. Aruga, M., Ito, S., Tsugawa, F., Matsumoto, K. and Kamiya, K., Expansion of measurement area of hand-scraped surface using stitching method for oblique-incident interferometer, Journal of Advanced Mechanical Design, Systems, and Manufacturing, Vol.17, No.1 (2023), pp. 1-10, DOI: 10.1299/jamdsm.2023jamdsm0010.

2. Blattler, A., Khajornrungruang, P., Suzuki, K. and Baba, A., Study on on-machine visualization of surface processing phenomena in nanoscale - 7th report: Developed nano-step patterns for nanoparticle absolute height verification, JSPE Semestrial Meeting Autumn 2021 (2021a), pp. 588-589, DOI:10.11522/pscjspe.2021A.0_588.

3. Blattler, A., Khajornrungruang, P., Suzuki, K. and Permpatdechakul, T., High-speed three-dimensional tracking of individual 100 nm polystyrene standard particles in multi-wavelength evanescent fields, Meas. Sci. Technol., Vol. 31 (2020), 094012, DOI:10.1088/1361-6501/ab87ec.

4. Blattler, A., Khajornrungruang, P., Suzuki, K. and Saenna S., A Novel method for 3D nanoscale tracking of 100 nm polystyrene particles in multi-wavelength evanescent fields microscopy - Absolute difference height verification -, International Journal of Automation Technology Vol.15, No.6 (2021b), pp. 831-841, DOI: 10.20965/ijat.2021.p0831.

5. Goto, D., Khajornrungruang, P., Blattler, A. and Kutomi, S., Sub-100nm height measurement of a nanoparticle position from surface based on optical interferometry and evanescent field, Proc. of the 19th International Conference on Precision Engineering (ICPE) (2022), Paper No. P-14.