1. Department of Mechanical Engineering (DME),Tsinghua University,The State Key Laboratory of Tribology and Tsinghua University (DME)-Siemens Joint Research Center for Advanced Robotics,Beijing 100084, Chinae-mail: XieZH1993@163.com
2. Department of Mechanical Engineering (DME),Tsinghua University,The State Key Laboratory of Tribology and Tsinghua University (DME)-Siemens Joint Research Center for Advanced Robotics,Beijing 100084, China;
3. Beijing Key Lab of Precision/Ultra-Precision Manufacturing Equipments and Control,Tsinghua University,Beijing 100084, Chinae-mail: xiefg@mail.tsinghua.edu.cn
4. Beijing Key Lab of Precision/Ultra-precision Manufacturing Equipments and Control,Tsinghua University,Beijing 100084, Chinae-mail: xinjunliu@tsinghua.edu.cn
5. Department of Mechanical Engineering (DME),Tsinghua University,The State Key Laboratory of Tribology and Tsinghua University (DME)-Siemens Joint Research Center for Advanced Robotics,Beijing 100084, Chinae-mail: wangjs@mail.tsinghua.edu.cn
6. Department of Mechanical Engineering,University of California at Berkeley,Berkeley CA 94701e-mail: x-che14@tsinghua.org.cn