A Multi-Purpose Temperature Control Method for MEMS Microheaters Without a Separate Temperature Sensor

Author:

Bae Byunghoon1,Yeom Junghoon1,Flachsbart Bruce R.1,Tang Yanjun1,Masel Richard I.1,Shannon Mark A.1

Affiliation:

1. University of illinois at Urbana-Champaign

Abstract

In this paper, a temperature-controlled method that does not use a separate temperature sensor is presented for different MEMS electrical resistance heaters. Instead of using a Resistance Temperature Detectors (RTD) sensor or micro-thermocouple for closed-loop control of the temperature, which will have a finite distance between the heater and sensor and a response delay due to the thermal mass of the substrate on which the sensor resides, we use the change in resistance with temperature of the electrical heating element itself for the control input.

Publisher

ASMEDC

Reference5 articles.

1. A. Jain, K. Ness, A. McConnell, L. Jiang, and K. Goodson, “Design, Fabrication and Thermal Characterization of a MEMS Device for Control of Nerve Cell Growth,” ASME International Mechanical Engineering Congress & Exposition Washington, D.C., Nov. 16–21, 2003.

2. Tian W.-C. , PangS. W., LuC.-J., and ZellersE. T., “Microfabricated Preconcentrator—Focuser for a Microscale Gas Chromatograph,” Journal of Microelectromechanical Systems, Vol. 12, No. 3, pp. 264–272, June 2003.

3. M. Graf, D. Barrettino, P. Kaser, J. Cerda, A. Hierlemann, and H. Baltes, “Smart Single-Chip CMOS Microhotplate Array for Metal-Oxide-Based Gas Sensors,” Transducers ‘03, 12th International Conference on Solid State Sensors, Actuators and Microsystems, Boston, pp. 123–126, June 8–12, 2003.

4. D.-S. Lee, S.-H. Park, H. Yang, T.- H. Yoon, S.-J. Kim, H. Kim, Y.- B. Shin, K. Kim and Y.- T. Kim, “Sub-Microliter-Volume PCR Chip with Fast Thermal Response and Very Low Power Consumption,” 7th Internatioonal Conference on Miniaturized Chemical and Biochemical Analysis Systems, pp. 187–190, Oct. 5–9, 2003, Squaw Valley, Californla U.S.A.

5. B. Selden, K.-J. Cho, and H. H. Asada, “Segmented Binary Control of Shape Memory Alloy Actuator Systems Using the Peltier Effect,” IEEE international Conference on Robotics 8 Automation, pp. 4931–4936, 2004 2004, New Orleans, LA

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号  京ICP备18003416号-3