Study of Nanoindentation Using FEM Atomic Model-Reference-Cited by-同舟云学术

Study of Nanoindentation Using FEM Atomic Model

Published:2004-10-01 Issue:4 Volume:126 Page:767-774
ISSN:0742-4787
Container-title:Journal of Tribology
language:en
Short-container-title:

Author:

Jeng Yeau-Ren¹,Tan Chung-Ming²³

Affiliation:

1. Department of Mechanical Engineering, National Chung Cheng University, Chia-Yi, Taiwan

2. Department of Mechanical Engineering, National Chung Cheng University, Chia-Yi, Taiwan;

3. Department of Mechanical Engineering, WuFeng Institute of Technology, Chia-Yi, Taiwan

Abstract

This paper adopts an atomic-scale model based on the nonlinear finite element formulation to analyze the stress and strain induced in a very thin film during the nanoindentation process. The deformation evolution during the nanoindentation process is evaluated using the quasi-static method, thereby greatly reducing the required computation time. The finite element simulation results indicate that the microscopic plastic deformation in the thin film is caused by instability of its crystalline structure, and that the magnitude of the nanohardness varies with the maximum indentation depth and the geometry of the indenter.

Publisher

ASME International

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Mechanical Engineering,Mechanics of Materials

Link

http://asmedigitalcollection.asme.org/tribology/article-pdf/126/4/767/5508405/767_1.pdf

Reference19 articles.

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2. Lucas, B. N., Oliver, W. C., and Swindeman, J. E., 1998, “The Dynamics of Frequency-Specific, Depth-Sensing Indentation Test,” Mater. Res. Soc. Symp. Proc., 522, pp. 3–14.

3. Hay, J. L., O’Hern, M. E., and Oliver, W. C., 1998, “The Importance of Contact Radius for Substrate-Independent Property Measurement of Thin Film,” Mater. Res. Soc. Symp. Proc., 522, pp. 27–32.

4. Hay, J. C., and Pharr, G. M., 1998, “Experiment Investigation of the Sneddon Solution and an Improved Solution for the Analysis of Nanoindentation Data,” Mater. Res. Soc. Symp. Proc., 522, pp. 39–44.

5. Lugscheider, E., Barimani, C., and Lake, M., 1998, “Mechanical Properties of Ti(C,N) and TiN Thin Films on Cutting Tools Measured by Nanoindentation,” Mater. Res. Soc. Symp. Proc., 522, pp. 311–316.

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