Numerical Modeling of Micromechanical Devices Using the Direct Simulation Monte Carlo Method

Author:

Piekos E. S.1,Breuer K. S.1

Affiliation:

1. Department of Aeronautics and Astronautics, MIT, 77 Massachusetts Avenue, Cambridge, MA 02139

Abstract

A direct simulation Monte Carlo (DSMC) investigation of flows related to microelectromechanical systems (MEMS) is detailed. This effort is intended to provide tools to facilitate the design and optimization of micro-devices as well as to probe the effects of rarefaction, especially in regimes not amenable to other means of analysis. The code written for this purpose employs an unstructured grid, a trajectory-tracing particle movement scheme, and an “infinite channel” boundary formulation. Its results for slip-flow and transition regime micro-channels and a micro-nozzle are presented to demonstrate its capabilities.

Publisher

ASME International

Subject

Mechanical Engineering

Reference17 articles.

1. Arkilic, E., Schmidt, M., and Breuer, K., 1994, “Slip Flow in Micro-channels,” Proceedings of the 19th Rarefied Gas Dynamics Symposium, July, Washington, DC AIAA.

2. Beskok A. , and KarniadakisG., 1994, “Simulation of Heat and Momentum Transfer in Complex Microgeometries,” Journal of Thermophysics and Heat Transfer, Vol. 8 (4), pp. 647–655.

3. Beskok, A., and Karniadakis, G., 1996, “Models and Scaling Laws for Rarefied Internal Gas Flows Including Separation,” Center for Fluid Mechanics #96-4, Brown University, Center for Fluid Mechanics Turbulence and Computation, Providence, RI.

4. Beskok, A., Karniadakis, G., and Trimmer, W., 1995, “Rarefaction, Compressibility and Thermal Creep Effects in Gas Microflows,” IMECE 95, Proceedings of the ASME Dynamic Systems and Control Division, DSC-Vol. 57-2, pp. 877–892.

5. Bird, G., 1981, “Monte Carlo Simulation in an Engineering Context,” Proceedings, 12th International Symposium on Rarefied Gas Dynamics, Charlottesville, VA, 1980, Vol. 74 of Progress in Aeronautics and Astronautics, AIAA, Washington, DC.

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