Reliability Based Design Optimization of MEMS Considering Pull-In

Abstract

The increased use of micro-electro-mechanical systems (MEMS) as key components for actuation and sensing purposes in novel devices and systems emphasizes the need for optimal design methods. Stochastic variations in manufacturing and operational conditions must be considered in order to meet performance goals. This study proposes a reliability based design optimization methodology for the design of geometrically complex electrostatically actuated MEMS. The first order reliability method is used for reliability analysis of fully-coupled electrostatic-mechanical problems. A general methodology for predicting the instability phenomenon of pull-in and incorporating it into an automatic optimization process is proposed and verified with analytical and experimental results. The potential of this methodology is illustrated with the design of an analog micromirror.