1. The State Key Laboratory of Tribology and Institute of Manufacturing Engineering, Department of Mechanical Engineering, Tsinghua University, Beijing 100084, China; Beijing Key Lab of Precision/Ultra-Precision Manufacturing Equipments and Control, Tsinghua University, Beijing 100084, China; Fraunhofer-Institut fuer Werkzeugmachinen und Umformtechnik (IWU), Reichenhainer Str. 88, Chemnitz D-09126, Germany
2. The State Key Laboratory of Tribology and Institute of Manufacturing Engineering, Department of Mechanical Engineering, Tsinghua University, Beijing 100084, China; Beijing Key Lab of Precision/Ultra-Precision Manufacturing Equipments and Control, Tsinghua University, Beijing 100084, China e-mail:
3. The State Key Laboratory of Tribology and Institute of Manufacturing Engineering, Department of Mechanical Engineering, Tsinghua University, Beijing 100084, China
4. Fraunhofer-Institut fuer Werkzeugmachinen und Umformtechnik (IWU), Reichenhainer Str. 88, Chemnitz D-09126, Germany