Noncontact Sphericity Measurement by Means of Phase Shift Interferometry-Reference-Cited by-同舟云学术

Noncontact Sphericity Measurement by Means of Phase Shift Interferometry

Published:1996-08-01 Issue:3 Volume:118 Page:394-399
ISSN:1087-1357
Container-title:Journal of Manufacturing Science and Engineering
language:en
Short-container-title:

Author:

Chang Ming¹,Lin P. P.²

Affiliation:

1. Mechanical Engineering Department, Chung Yuan Christian University, Chung Li, Taiwan

2. Mechanical Engineering Department, Cleveland State University, Cleveland, Ohio 44115

Abstract

This paper presents an accurate optical technique for sphericity measurement of a ball by means of phase shift interferometry. The ball is placed in a fixture on a numerically control rotary stage to achieve a 360 degrees inspection. A CCD camera is used to capture the images of interference fringes, and the generated interferograms are used to calculate the phase values which can then be used to quantify the sphericity error. With the calculated phase values, the eccentricity of the rotary stage’s spindle can be estimated and compensated. The Zernike polynomials is employed in the process of calibration to gracefully remove defocus and tilts. The experimental procedure, the sphericity measurement results and their statistical data analysis are presented.

Publisher

ASME International

Subject

Industrial and Manufacturing Engineering,Computer Science Applications,Mechanical Engineering,Control and Systems Engineering

Link

http://asmedigitalcollection.asme.org/manufacturingscience/article-pdf/118/3/394/5558090/394_1.pdf

Reference29 articles.

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2. Born, M., and Wolf, E., 1964, “Principles of Optics, Pergamon Press, New York, pp. 464.

3. Bruning J. H. , GallagherD. P., RosenfeldA. D., BrangaccioD. J., and HerriottD. R., 1974, “Digital Wavefront Measuring Inteferometer for Testing Optical Surfaces and Lens,” Applied Optics, V13, p. 26932693.

4. BS3730: 1964, “Assessment of Departure from Roundness,” British Standards Institute.

5. Burch, J. M., 1969, “Interferometry with Scattered Light,” in Optical Instruments and Techniques, Editored by J. Dickson, Oriel Press, England, pp. 213.

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