1. Graduate School of Nagaoka University of Technology, Department of Energy and Environment Science, Kamitomioka-machi 1603-1, Nagaoka-shi 940-2188, Niigata, Japan e-mail:
2. Department of Mechanical Engineering, Nagaoka University of Technology, Kamitomioka-machi 1603-1, Nagaoka-shi 940-2188, Niigata, Japan e-mail:
3. Department of Mechanical Engineering, Nagaoka University of Technology, Kamitomioka-machi 1603-1, Nagaoka-shi 940-2188, Niigata, Japan e-mail:
4. EBARA Corporation, Honfujisawa 4-2-1, Fujisawa-shi 251-8502, Kanagawa, Japan e-mail: