Low-Residual-Stress Amorphous Film for LiTaO<sub>3</sub>/Quartz or LiNbO<sub>3</sub>/Quartz Bonding toward 5G Surface Acoustic Wave Devices-Reference-Cited by-同舟云学术

Low-Residual-Stress Amorphous Film for LiTaO₃/Quartz or LiNbO₃/Quartz Bonding toward 5G Surface Acoustic Wave Devices

Published:2020 Issue:0 Volume:13 Page:E19-009-1-E19-009-7
ISSN:1883-3365
Container-title:Transactions of The Japan Institute of Electronics Packaging
language:en
Short-container-title:Transactions of The Japan Institute of Electronics Packaging

Author:

Tezuka Ami¹,Kuwae Hiroyuki¹,Yamada Kosuke¹,Shoji Shuichi¹,Kakio Shoji²,Mizuno Jun³⁴

Affiliation:

1. Nano-Science and Nano-Engineering, Waseda University

2. Graduate Faculty of Interdisciplinary Research, University of Yamanashi

3. Research Organization for Nano and Life innovation, Waseda University

4. Organization for Regional Collaborative Research and Development, Tokyo University of Science

Publisher

Japan Institute of Electronics Packaging

Link

https://www.jstage.jst.go.jp/article/jiepeng/13/0/13_E19-009-1/_pdf

Reference24 articles.

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2. [2] R. Hauser, L. Reindi, and J. Biniasch, "High-temperature stability of LiNbO₃ SAW devices," IEEE Symposium on Ultrasonics, pp. 192–195, 2003.

3. [3] S. J. William, "On waves propagated along the plane surface of an elastic solid," Proc. the London Mathematical Society, 17.1, pp. 4–11, 1885.

4. [4] A. Renaudin, P. Tabourier, V. Zhang, J. C. Camart, and C. Druon, "SAW nanopump for handling droplets in view of biological applications," Sens Actuators B, Vol. 113, pp. 389–397, 2006.

5. [5] K. Kurimoto, S. Osaki, K. Kishida, T. Yonai, J. Mizuno, and S. Kakio, "Improvement of Surface Acoustic Waves Property on LiNbO₃ or LiTaO₃ Thin Plate Bonded to quartz Substrate," Japan Steel Works technical review, Vol. 68, pp. 35–42, 2017.

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