ZnO thin-film transistor grown by rf sputtering using Zn metal target and oxidizer pulsing
Author:
Affiliation:
1. Department of Electrical and Computer Engineering, Ajou University
2. Materials Research Center for Element Strategy, Tokyo Institute of Technology
3. Graduate School of IT Convergence, Ajou University
Publisher
Ceramic Society of Japan
Subject
Materials Chemistry,Condensed Matter Physics,General Chemistry,Ceramics and Composites
Link
https://www.jstage.jst.go.jp/article/jcersj2/125/3/125_16236/_pdf
Reference21 articles.
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3. 3) A. Lu and H. Huang, Jap. J. Appl. Phys., 54, 106502 (2015).
4. 4) P. K. Nayak, Z. Wang, D. H. Anjum, M. N. Hedhili and H. N. Alshareef, Appl. Phys. Lett., 106, 103505 (2015).
5. 5) J. Jo, H. Choi, O. Seo and B. Lee, Thin Solid Films, 517, 6337–6340 (2009).
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