Enhancement of crystal anisotropy and ferroelectricity by decreasing thickness in (Al,Sc)N films-Reference-Cited by-同舟云学术

Enhancement of crystal anisotropy and ferroelectricity by decreasing thickness in (Al,Sc)N films

Published:2022-07-01 Issue:7 Volume:130 Page:436-441
ISSN:1348-6535
Container-title:Journal of the Ceramic Society of Japan
language:en
Short-container-title:J. Ceram. Soc. Japan

Author:

Yasuoka Shinnosuke¹,Mizutani Ryoichi¹,Ota Reika¹,Shiraishi Takahisa¹,Shimizu Takao¹,Yasui Shintaro²,Ehara Yoshitaka³,Nishida Ken³,Uehara Masato⁴,Yamada Hiroshi⁴,Akiyama Morito⁴,Imai Yasuhiko⁵,Sakata Osami⁵,Funakubo Hiroshi¹

Affiliation:

1. Department of Materials Science and Engineering, Tokyo Institute of Technology

2. Laboratory for Materials and Structures, Tokyo Institute of Technology

3. Department of Communications Engineering, National Defense Academy

4. Sensing System Research Center, National Institute of Advanced Industrial Science and Technology (AIST)

5. Center for Synchrotron Radiation Research, Japan Synchrotron Radiation Research Institute (JASRI)

Publisher

Ceramic Society of Japan

Subject

Materials Chemistry,Condensed Matter Physics,General Chemistry,Ceramics and Composites

Link

https://www.jstage.jst.go.jp/article/jcersj2/130/7/130_21184/_pdf

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