1. Hahn-Schickard-Gesellschaft, Institute of Microsystems and Information Technology (HSG-IMIT), Villingen-Schwenningen, Germany
2. Institute of Geodesy and Geoinformation, University of Bonn, Bonn, Germany
3. Fritz Huettinger Chair of Microelectronics, Department of Microsystems Engineering - IMTEK, University of Freiburg, Freiburg, Germany