Microscale electrostatic energy harvester using internal impacts

Abstract

This article presents a new concept for electrostatic energy harvesting devices that increase output power under displacement limited inertial mass motion at sufficiently large acceleration amplitudes. The concept is illustrated by two demonstrated electrostatic energy harvesting prototypes in the same die dimension: a reference device with end-stops and an impact device with movable end-stops functioning as slave transducers. Both devices are analyzed and characterized in small and large excitation regimes. We found that significant additional energy from the internal impact force can be harvested by the slave transducer. The impact device gives much higher, up to a factor of 3.7, total output power than the reference device at the same high-acceleration amplitude. The bandwidth of the response to frequency sweeps is beneficially enlarged by up to a factor of 20 by the nonlinear mechanisms of the impact device.