Ultimate resolution limits for scanning electron microscope immersion objective lenses-Reference-Cited by-同舟云学术

Ultimate resolution limits for scanning electron microscope immersion objective lenses

Published:2002 Issue:2 Volume:113 Page:67-77
ISSN:0030-4026
Container-title:Optik
language:en
Short-container-title:Optik

Author:

Khursheed Anjam

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference16 articles.

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3. Recent developments in scanning electron microscope design;Khursheed;Adv. Imaging Electron Phys.,2001

4. Aspects of aberration correction in LVSEM;Zach;Proc. EUREM 12, Brno Czech republic,2000

5. High resolution low voltage electron optical system for very large specimens;Shao;Rev. Sci. Instrum.,1989

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