System Development for Fabricating Mandrel of Soft X-ray Rotating-Body Mirror (2nd Report)

Author:

TAKEI Yoshinori,MIMURA Hidekazu

Publisher

Japan Society for Precision Engineering

Subject

Mechanical Engineering

Reference5 articles.

1. 1) J. Voss, H. Dadras, C. Kunz, A. Moewes, G. Roy, H. Sievers, I. Storjohann and H. Wongel. “A Scanning Soft X-Ray Microscope with an Ellipsoidal Focusing Mirror.” Journal of X-Ray Science and Technology 3, 85-108, (1992).

2. 2) Yoshinori Takei, Takehiro Kume, Hiroto Motoyama, Kentarou Hiraguri, Hirokazu Hashizume, Hidekazu Mimura, "Development of a numerically controlled elastic emission machining system for fabricating mandrels of ellipsoidal focusing mirrors used in soft x-ray microscopy." Proceedings of SPIE Vol. 8848, 88480C (2013).

3. 3) H. Motoyama, T. Saito, and H. Mimura, “Error Analysis of Ellipsoidal Mirror for Soft X-ray Focusing by Wave-Optical Simulation”, Jpn. J. Appl. Phys. 53 (2014) 022503. 56-62(2006).

4. 6) Youichi Bitou and Yohan Kondo "High-lateral-resolution scanning deflectometric profiler using a commercially available autocollimator" Measurement Science and Technology, 25 (2014).

5. 10) Thwaite, E.G. “A method of obtaining an error free reference line for the measurement of straightness. Messtechnik, 10, 317-318 (1973)..

Cited by 2 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. JSPE Affiliate News;Journal of the Japan Society for Precision Engineering;2022-05-05

2. Optical design of a sub-1-μm focusing system for soft x-ray free electron lasers;Advances in X-Ray/EUV Optics and Components XII;2017-09-06

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