The Influence of Particle Morphology on the Si(001) Surface in EEM (Elastic Emission Machining)

Author:

KUBOTA Akihisa,MIMURA Hidekazu,INAGAKI Kouji,MORI Yuzo,YAMAUCHI Kazuto

Publisher

Japan Society for Precision Engineering

Reference20 articles.

1. 1) T. Ishikawa : Exotic Silicon Optics Elements at the Spring-8, in Precision Science and Technology for perfect surfaces., Y. Furukawa, Y. Mori & T. Kataoka (eds), JSPE, Tokyo, (1999) 3.

2. 2) H. Kinoshita, T. Watanabe, J. Daniel, D. Bajuk, Y. Platonov and J. Wood : Development of 3-Asperical Mirror Optics fore extreme Ultraviolet Lithography, in Precision Science and Technology for perfect surface., Y. Furukawa, Y. Mori & T. Kataoka (eds), JSPE, Tokyo, (1999) 9.

3. 3) K.B. Becker : Fabrication Technologies for “perfect” Optics, in Precision Science and Technology for perfect surfaces., Y. Furukawa, Y. Mori & T. Kataoka (eds), JSPE, Tokyo, (1999) 51.

4. 4) M. Weiser, J. Froschke, H. Handschuh, M. Julich, M. Mayer and G. Seitz : Asperical Surfaces at 100pm Accuracy, in Precision Science and Technology for perfect surfaces., Y. Furukawa, Y. Mori & T. Kataoka (eds), JSPE, Tokyo, (1999) 61.

5. Special issue on globalization. Extreme precision machining techniques.

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