Super-Precise Evaluation of EUVL-grade Ultra-Low-Expansion Glasses Using the Line-Focus-Beam Ultrasonic Material Characterization System

Author:

KUSHIBIKI Jun-ichi,ARAKAWA Mototaka,OHASHI Yuji

Publisher

Japan Society for Precision Engineering

Subject

Mechanical Engineering

Reference24 articles.

1. 1) K.E. Hrdina, B.G. Ackerman, A.W. Fanning, C.E. Heckle, D.C. Jenne and W.D. Navan : Measuring and Tailoring CTE within ULE® Glass, Proc. SPIE, 5037 (2003) 227.

2. 2) G. Rempe, R.J. Thompson, H.J. Kimble and R. Lalezari : Measurement of Ultralow Losses in an Optical Interferometer, Opt. Lett., 17, 5 (1992) 363.

3. 3) P.C. Schultz and H.T. Smyth : Ultra-low-expansion Glasses and Their Structure in the SiO2-TiO2 System, Amorphous Materials, Willey-Interscience, New York, (1970) 453.

4. 4) R.B. Greegor, F.W. Lytle, D.R. Sandstrom, J. Wong and P. Schultz : Investigation of TiO2-SiO2 Glasses by X-ray Absorption Spectroscopy, J. Non-Cryst. Solid., 55 (1983) 27.

5. 5) J. Kushibiki and N. Chubachi : Material Characterization by Line-focus-beam Acoustic Microscope, IEEE Trans. Sonics Ultrason., SU-32, 2 (1985) 189.

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