Femtosecond Laser Processing for Functional Microdevice Fabrication

Author:

NISHIYAMA Hiroaki

Publisher

Japan Society for Precision Engineering

Subject

Mechanical Engineering

Reference14 articles.

1. 1) K. M. Davis, K. Miura, N. Sugimoto and K. Hirao : Writing Waveguides in Glass with a Femtosecond Laser, Opt. Lett., 27, 21 (1996) 1729.

2. 2) J. Qiu, C. Zhu, T. Nakaya, J. Si, K. Kojima, F. Ogura and K. Hirao : Space-selective Valence State Manipulation of Transition Metal Ions inside Glasses by a Femtosecond Laser, Appl. Phys. Lett., 79, 22 (2001) 3567.

3. 3) I. Miyamoto, K. Cvecek and M. Schmidt : Crack-free Conditions in Welding of Glass by Ultrashort Laser Pulse, Opt. Express, 21, 12 (2013) 14291.

4. 4) S. Kawata, H.-B. Sun, T. Tanaka and K. Takada : Finer Features for Functional Microdevices, Nature, 412 (2001) 697.

5. 5) J. Homola, I. Koudela and S. S. Yee : Surface Plasmon Resonance Sensors Based on Diffraction Gratings and Prism Coupler : Sensitivity Comparison, Sensors and Actuators B, 54 (1999) 16.

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