Influence of Electrolyzed Oxidizing Water on the Surface of Permalloy 45
Author:
Publisher
Japan Society for Precision Engineering
Subject
Mechanical Engineering
Reference11 articles.
1. 2) Koichiro Saga and Takeshi Hattori : Wafer Cleaning Using Supercritical CO2 in Semiconductor and Nanoelectronic Device Fabrication, Solid State Phenomena, 134 (2008) 97.
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