Capacitor-on-metal/via-stacked-plug (CMVP) memory cell for 0.25 μm CMOS embedded FeRAM-Reference-Cited by-同舟云学术

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Capacitor-on-metal/via-stacked-plug (CMVP) memory cell for 0.25 μm CMOS embedded FeRAM

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Container-title:International Electron Devices Meeting 1998. Technical Digest (Cat. No.98CH36217)
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Author:

Amanuma K.,Tatsumi T.,Maejima Y.,Takahashi S.,Hada H.,Okizaki H.,Kunio T.

Publisher

IEEE

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