Physical Origins of High Normal Field Mobility Degradation in Ge p- and n-MOSFETs With GeOx/Ge MOS Interfaces Fabricated by Plasma Postoxidation

Author:

Funder

National Program on Key Basic Research Project (973 Program) of China

Grant-in-Aid for Scientific Research

Ministry of Education, Culture, Sports, Science and Technology of Japan

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials

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