Gain Efficiency of 28 nm-node Various Channelwidth pMOSFETs under Nitrogen Concentration of DPN Treatment

Author:

Xu Jia-You1,Shen Tien-Szu1,Chu Wei-Lun1,Chen Zhi-Kai1,Hu Hao-Lun1,Wang Ming-Han2,Wang Mu-Chun1

Affiliation:

1. Minghsin University of Science and Technology,Department of Electronic Engineering,Hsinchu,Taiwan,30401

2. Hsinchu Chien-Kung Senior High School,Hsinchu City,Taiwan,300046

Publisher

IEEE

Reference11 articles.

1. Suppressing the loss and enhancing the breakdown strengths of high-k materials via constructing layered structure

2. Electrical Performance of 28 nm-Node Varying Channel-Width nMOSFETs under DPN Process Treatments

3. Intrinsic hot-carrier degradation of nMOSFETs by decoupling PBTI component in 28nm high-k/metal gate stacks;hsu;IEEE IRPS,2012

4. Current transport in metal/hafnium oxide/silicon structure

5. Introduction to Semiconductor Manufacturing Technology;xiao,2012

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