MEMS Differential Thermopiles for High-Sensitivity Hydrogen Gas Detection-Reference-Cited by-同舟云学术

MEMS Differential Thermopiles for High-Sensitivity Hydrogen Gas Detection

Published:2023-01-15 Issue: Volume: Page:
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Container-title:2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)
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Author:

Zhang Haozhi¹,Jia Hao¹,Li Ming¹,Xu Pengcheng¹,Li Xinxin¹

Affiliation:

1. Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences,State Key Lab of Transducer Technology,Shanghai,China,200050

Funder

National Natural Science Foundation of China

Chinese Academy of Sciences

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/10052111/10052113/10052631.pdf?arnumber=10052631

Reference12 articles.

1. Area-Selective, In-Situ Growth of Pd-Modified ZnO Nanowires on MEMS Hydrogen Sensors

2. Hydrogen sensor of Pd-decorated tubular TiO2 layer prepared by anodization with patterned electrodes on SiO2/Si substrate

3. A Front-Side Microfabricated Tiny-Size Thermopile Infrared Detector With High Sensitivity and Fast Response

4. Robust hydrogen detection system with a thermoelectric hydrogen sensor for hydrogen station application

5. High-performance H2 sensors with selectively hydrophobic micro-plate for self-aligned upload of Pd nanodots modified mesoporous In2O3 sensing-material

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1. High-Sensitive Hydrogen Detection in Oxygen-Free Environment with MEMS Differential Thermopiles;2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS);2024-01-21

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