Ultra-Wideband Mems Filters Using Localized Thinned 128° Y-Cut Thin-Film Lithium Niobate-Reference-Cited by-同舟云学术

Ultra-Wideband Mems Filters Using Localized Thinned 128° Y-Cut Thin-Film Lithium Niobate

Published:2023-01-15 Issue: Volume: Page:
ISSN:
Container-title:2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)
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Author:

Wu Jinbo¹,Zhang Shibin¹,Zheng Pengcheng¹,Zhang Liping¹,Yao Hulin¹,Fang Xiaoli¹,Tian Xuedi¹,Zhao Xiaomeng¹,Wu Tao²,Ou Xin¹

Affiliation:

1. Shanghai Institute of Microsystem and Information Technology,The State Key Laboratory of Functional Materials for Informatics,Shanghai,China,200050

2. Shanghai Tech University,Shanghai,China,201210

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/10052111/10052113/10052357.pdf?arnumber=10052357

Reference22 articles.

1. High-Q bandpass filters using hybrid acoustic-wave-lumped-element resonators (AWLRs) for UHF applications

2. Acoustic Wave Transversal Filter for 5G N77 Band

3. A1 Resonators in 128° Y-cut Lithium Niobate with Electromechanical Coupling of 46.4%

4. First shear horizontal mode plate wave in LiNbO3 showing 20 km/s phase velocity;kadota;Proc IEEE Int Ultrason Symp (IUS),2015

5. Lateral Spurious Mode Suppression in Lithium Niobate A1 Resonators

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