An ALSCN PMUT-on-CMOS Sensor for Monitoring Fluids’ Density, Viscosity, Sound Velocity, and Compressibility-Reference-Cited by-同舟云学术

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An ALSCN PMUT-on-CMOS Sensor for Monitoring Fluids’ Density, Viscosity, Sound Velocity, and Compressibility

Published:2023-01-15 Issue: Volume: Page:
ISSN:
Container-title:2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)
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Author:

Ledesma Eyglis¹,Zamora Iván¹,Yanez Jesús¹,Uranga Arantxa¹,Barniol Núria¹

Affiliation:

1. Universitat Autonoma de Barcelona,Electronics Engineering Department,Barcelona,Spain,08193

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/10052111/10052113/10052334.pdf?arnumber=10052334

Reference14 articles.

1. Piezoelectric Micromachined Ultrasonic Transducer for Arterial Wall Dynamics Monitoring

2. Design, Fabrication, Characterization, and System Integration of a 1-D PMUT Array for Medical Ultrasound Imaging

3. A $128\times 1$ Phased Array Piezoelectric Micromachined Ultrasound Transducer (pMUT) for Medical Imaging

4. Monolithic ultrasound fingerprint sensor

5. Monolithic PMUT-on-CMOS Ultrasound System for Single Pixel Acoustic Imaging

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Characterization and Optimization of PZT-Based PMUTs With Wide Range Frequency Tuning;Journal of Microelectromechanical Systems;2024-08

2. Design and Characterization of a Sc_20%Al_1-20%N-Based PMUTs Array for an Underwater Communication System;IEEE Sensors Journal;2024-06-15

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