Through-Silicon Stroboscopic Characterization of an Oscillating MEMS Thermal Actuator Using Supercontinuum Interferometry-Reference-Cited by-同舟云学术

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Through-Silicon Stroboscopic Characterization of an Oscillating MEMS Thermal Actuator Using Supercontinuum Interferometry

Published:2013-08 Issue:4 Volume:18 Page:1418-1420
ISSN:1083-4435
Container-title:IEEE/ASME Transactions on Mechatronics
language:
Short-container-title:IEEE/ASME Trans. Mechatron.

Author:

Hanhijarvi Kalle,Kassamakov Ivan,Aaltonen Juha,Heikkinen Ville,Sainiemi Lauri,Franssila Sami,Haeggstrom Edward

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Computer Science Applications,Control and Systems Engineering

Link

http://xplorestaging.ieee.org/ielx5/3516/6553370/06403614.pdf?arnumber=6403614

Cited by 7 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

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2. Efficient Blind Signal Reconstruction With Wavelet Transforms Regularization for Educational Robot Infrared Vision Sensing;IEEE/ASME Transactions on Mechatronics;2019-02

3. White Light Interferometry;Handbook of Advanced Nondestructive Evaluation;2019

4. Nondestructive surface profiling of hidden MEMS using an infrared low-coherence interferometric microscope;Surface Topography: Metrology and Properties;2018-02-27

5. White Light Interferometry;Handbook of Advanced Non-Destructive Evaluation;2018

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