A micro channel integrated gas flow sensor for high sensitivity

Author:

Bolin Yu ,Zhiyin Gan ,Shu Cao ,Jingping Xu ,Sheng Liu

Publisher

IEEE

Cited by 12 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Fabrication of Polymer Membrane-Suspended Microstructures on Printed Circuit Boards;Journal of Microelectromechanical Systems;2022-06

2. Design and applications of MEMS flow sensors: A review;Sensors and Actuators A: Physical;2019-08

3. Sensitivity Enhancement of Silicon-on-Insulator CMOS MEMS Thermal Hot-Film Flow Sensors by Minimizing Membrane Conductive Heat Losses;Sensors;2019-04-18

4. Multiparametric capillary sensor: stabilization of local heating;Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments 2018;2018-10-01

5. Analysis of measurement conditions for detecting change in vital signs with catheter flow sensor;Journal of Micromechanics and Microengineering;2018-07-26

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