Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials
Cited by
28 articles.
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1. X-Ray Lithography;Handbook of VLSI Microlithography;2001
2. Photomask Etching;Handbook of Advanced Plasma Processing Techniques;2000
3. Resist materials and processes for X-ray lithography;IBM Journal of Research and Development;1993-05
4. X-RAY LITHOGRAPHY;Handbook of Vlsi Microlithography;1991
5. X-ray lithography using broadband sources;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1988-01