Monolithic piezoelectric in-plane motion stage with low cross-axis-coupling-Reference-Cited by-同舟云学术

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Monolithic piezoelectric in-plane motion stage with low cross-axis-coupling

Published:2014-01 Issue: Volume: Page:
ISSN:
Container-title:2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)
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Author:

Nadig Sachin,Ardanuc Serhan,Lal Amit

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/6749560/6765550/06765693.pdf?arnumber=6765693

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Electrostatically Actuated SOI In-Plane Motion Platform for In-Situ Calibration of Micro Gyroscopes;2023 IEEE SENSORS;2023-10-29

2. A Broadband and Low Damping Piezoelectric MEMS Vibration Platform for 6-DOF Inertial Motion;IEEE Sensors Journal;2023-09-15

3. Traffic Light Scheduling for Pedestrian-Vehicle Mixed-Flow Networks;IEEE Transactions on Intelligent Transportation Systems;2019-04

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